Advances in Optical Thin Films

absorption Advances in Optical aluminum angle of incidence Angus Macleod annealing antireflection coatings applications arc current band band-pass filters beam splitters broadband calculated capping layer chirped mirrors Claude Amra color colorimetry components curves deposition process deposition rate dielectric dispersion edge filter electron energy evaporation experimental faraday cup Figure film thickness fluoride GdF3 glass group delay high reflecting incident angle increase interface ion current density irradiation J/cm² LaF3 laser damage layer thickness light magnetron magnetron sputtering mbar measured Mo/Si multilayer mirrors Norbert Kaiser optical coatings optical monitoring optical properties optical thickness Optical Thin Films optimized oxide parameters phase photonic plasma polarization Proc pulse refractive index profile rugate sample shift silica silicon simulation single layer SiO2 spatial spectral range spectral region SPIE Vol stability stack structure substrate substrate temperature superprism surface target thermal thin film Thin-Film Optical Filters transmission transmittance values Wavelength nm