Thin Film Materials: Stress, Defect Formation and Surface EvolutionCambridge University Press, 8 ene 2004 - 750 páginas Thin film mechanical behavior and stress presents a technological challenge for materials scientists, physicists and engineers. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation, surface evolution and allied effects in thin film materials. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described. Theoretical concepts are underpinned by discussions on experimental methodology and observations. Fundamental scientific concepts are embedded through sample calculations, a broad range of case studies with practical applications, thorough referencing, and end of chapter problems. With solutions to problems available on-line, this book will be essential for graduate courses on thin films and the classic reference for researchers in the field. |
Índice
| 1 | |
| 2 | |
| 6 | |
| 15 | |
14 Film microstructures | 30 |
15 Processing of microelectronic structures | 47 |
16 Processing of MEMS structures | 52 |
17 Origins of film stress | 60 |
MEMS capacitive transducer | 378 |
59 Film peeling | 382 |
510 Exercises | 385 |
Dislocation formation in epitaxial systems | 387 |
61 Dislocation mechanics concepts | 388 |
62 Critical thickness of a strained epitaxial film | 396 |
63 The isolated threading dislocation | 406 |
64 Layered and graded films | 416 |
18 Growth stress in polycrystalline films | 63 |
19 Consequences of stress in films | 83 |
Film stress and substrate curvature | 86 |
21 The Stoney formula | 87 |
22 Influence of film thickness on bilayer curvature | 93 |
23 Methods for curvature measurement | 104 |
24 Layered and compositionally graded films | 114 |
25 Geometrically nonlinear deformation range | 127 |
26 Bifurcation in equilibrium shape | 132 |
27 Exercises | 151 |
Stress in anisotropic and patterned films | 154 |
31 Elastic anisotropy | 155 |
32 Elastic constants of cubic crystals | 157 |
33 Elastic constants of noncubic crystals | 161 |
34 Elastic strain in layered epitaxial materials | 163 |
35 Film stress for a general mismatch strain | 166 |
36 Film stress from xray diffraction measurement | 171 |
37 Substrate curvature due to anisotropic films | 180 |
38 Piezoelectric thin film | 185 |
39 Periodic array of parallel film cracks | 188 |
310 Periodic array of parallel lines or stripes | 201 |
311 Measurement of stress in patterned thin films | 212 |
312 Exercises | 216 |
Delamination and fracture | 220 |
41 Stress concentration near a film edge | 221 |
42 Fracture mechanics concepts | 232 |
43 Work of fracture | 246 |
44 Film delamination due to residual stress | 258 |
45 Methods for interface toughness measurement | 272 |
46 Film cracking due to residual stress | 282 |
47 Crack deflection at an interface | 297 |
48 Exercises | 309 |
Film buckling bulging and peeling | 312 |
51 Buckling of a strip of uniform width | 313 |
52 Buckling of a circular patch | 327 |
53 Secondary buckling | 338 |
54 Experimental observations | 341 |
55 Film buckling without delamination | 350 |
56 Pressurized bulge of uniform width | 355 |
57 Circular pressurized bulge | 366 |
65 Model system based on the screw dislocation | 424 |
66 Nonplanar epitaxial systems | 430 |
67 The influence of substrate compliance | 441 |
68 Dislocation nucleation | 451 |
69 Exercises | 461 |
Dislocation interactions and strain relaxation | 464 |
71 Interaction of parallel misfit dislocations | 465 |
72 Interaction of intersecting misfit dislocations | 470 |
73 Strain relaxation due to dislocation formation | 480 |
74 Continuum analysis of ideally plastic films | 488 |
75 Strainhardening response of thin films | 496 |
76 Models based on plastic rate equations | 508 |
77 Structure evolution during thermal excursion | 515 |
78 Sizedependence of plastic yielding in thin films | 527 |
79 Methods to determine plastic response of films | 535 |
710 Exercises | 547 |
Equilibrium and stability of surfaces | 550 |
81 A thermodynamic framework | 551 |
82 Chemical potential of a material surface | 553 |
83 Elliptic hole in a biaxially stressed material | 567 |
84 Periodic perturbation of a flat surface | 573 |
85 General perturbation of a flat surface | 588 |
86 Contact of material surfaces with cohesion | 592 |
87 Consequences of misfit dislocation strain fields | 598 |
88 Surface energy anisotropy in strained materials | 604 |
89 Strained epitaxial islands | 615 |
810 Exercises | 638 |
The role of stress in mass transport | 641 |
91 Mechanisms of surface evolution | 643 |
92 Evolution of small surface perturbations | 648 |
93 A variational approach to surface evolution | 657 |
94 Growth of islands with stepped surfaces | 665 |
95 Diffusion along interfaces | 673 |
96 Compositional variations in solid solutions | 681 |
electromigration | 697 |
98 Exercises | 711 |
References | 713 |
Author index | 738 |
| 745 | |
Otras ediciones - Ver todo
Thin Film Materials: Stress, Defect Formation and Surface Evolution L. B. Freund,S. Suresh No hay ninguna vista previa disponible - 2003 |
Thin Film Materials: Stress, Defect Formation and Surface Evolution L. B. Freund,S. Suresh No hay ninguna vista previa disponible - 2008 |
Términos y frases comunes
alloy assumed atoms behavior biaxial buckle Burgers vector chemical potential compressive configuration critical thickness crystal crystallographic curve D₁ deflection deformation delamination delamination front deposition determined diffusion direction driving force elastic energy elastic modulus elastic strain electromigration energy release rate epitaxial equation equi-biaxial equilibrium evolution film and substrate film material film stress film thickness film-substrate interface film-substrate system fracture free energy free surface function glide glide plane grain boundary growth surface island isotropic lattice loading magnitude mechanical membrane metal midplane misfit dislocation mismatch strain mismatch stress normalized nucleation orientation parameters perturbation phase angle physical plane strain Poisson ratio polycrystalline quantum wire ratio represented result Schematic Section shear shear stress shown in Figure solid strain relaxation stress field structure substrate curvature substrate material surface energy symmetry temperature tensile tensile stress thermal thin film threading dislocation traction versus zero
Pasajes populares
Página 719 - A criterion for arrest of a threading dislocation in aa strained epitaxial layer due to an interface misfit dislocation in its path. J. Appl. Phys. 68, 2073-2080.
Página 719 - Chason, E., Seel, SC, and Thompson, CV, "The Dynamic Competition Between Stress Generation and Relaxation Mechanisms During Coalescence of Volmer- Weber Thin Films," Journal of Applied Physics, Vol.